Photoluminescence properties of ZnO:Al films deposited on flexible PET substrate by RF reactive magnetron sputtering
2013 (English)In: Optoelectronics and Advanced Materials Rapid Communications, ISSN 1842-6573, Vol. 7, no 9-10, 676-679 p.Article in journal (Refereed) Published
Aluminium-doped ZnO (AZO) thin films have been deposited on flexible polyethylene terephthalate (PET) substrate by RF reactive magnetron sputtering process at low substrate temperature (room -100 degrees C), and their photoluminescence (PL) behavior at room temperature and the influence of O-2:Ar ratio, substrate temperature, and deposition time were investigated. The strong near band-edge UV emission and the weak blue emission were observed, while the defect-related deep-level green emission was nearly absent, indicating that high optical quality AZO films, grown on flexible PET substrate, were obtained using the RF reactive magnetron sputtering technique. The origin of the emissions is discussed.
Place, publisher, year, edition, pages
2013. Vol. 7, no 9-10, 676-679 p.
ZnO:Al (AZO), Thin films, Flexible PET, RF reactive magnetron sputtering, Photoluminescence
IdentifiersURN: urn:nbn:se:su:diva-97401ISI: 000326414600011OAI: oai:DiVA.org:su-97401DiVA: diva2:678036